Nanolithosolution provides a comprehensive system for patterning 3D nanostructures with sub-20 nm resolution. Nanolithosolution's technology allows any facility to use its current photolithography equipment to achieve nano-scale patterning with precise and accurate overlay alignment. We provide all the necessary components and support, including:

Nano-fabrication module and controller,
Auto ReleaseTM imprinting mold substrate,
and imprint fabrication process specifications.

Nanolithosolution’s technology is well-suited for customers in research and development, where traditional microscale photolithography resolution may not be sufficient.


optical devices, displays, data storage, biotech, semiconductor ICs, chemical synthesis, and advanced materials.



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